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基于氧离子推拉机制的双功能忆阻开关

Dual-functional Memory and Threshold Resistive Switching Based on the Push-Pull Mechanism of Oxygen Ions.

作者信息

Huang Yi-Jen, Chao Shih-Chun, Lien Der-Hsien, Wen Cheng-Yen, He Jr-Hau, Lee Si-Chen

机构信息

Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan.

Department of Materials Science and Engineering, National Taiwan University, Taipei 10617, Taiwan.

出版信息

Sci Rep. 2016 Apr 7;6:23945. doi: 10.1038/srep23945.

Abstract

The combination of nonvolatile memory switching and volatile threshold switching functions of transition metal oxides in crossbar memory arrays is of great potential for replacing charge-based flash memory in very-large-scale integration. Here, we show that the resistive switching material structure, (amorphous TiOx)/(Ag nanoparticles)/(polycrystalline TiOx), fabricated on the textured-FTO substrate with ITO as the top electrode exhibits both the memory switching and threshold switching functions. When the device is used for resistive switching, it is forming-free for resistive memory applications with low operation voltage (<± 1 V) and self-compliance to current up to 50 μA. When it is used for threshold switching, the low threshold current is beneficial for improving the device selectivity. The variation of oxygen distribution measured by energy dispersive X-ray spectroscopy and scanning transmission electron microscopy indicates the formation or rupture of conducting filaments in the device at different resistance states. It is therefore suggested that the push and pull actions of oxygen ions in the amorphous TiOx and polycrystalline TiOx films during the voltage sweep account for the memory switching and threshold switching properties in the device.

摘要

交叉阵列存储器中过渡金属氧化物的非易失性存储器切换和易失性阈值切换功能相结合,在超大规模集成电路中取代基于电荷的闪存具有巨大潜力。在此,我们展示了在以ITO作为顶电极的纹理化FTO衬底上制备的电阻切换材料结构(非晶态TiOx)/(Ag纳米颗粒)/(多晶态TiOx)兼具存储器切换和阈值切换功能。当该器件用于电阻切换时,对于低工作电压(<±1 V)的电阻式存储器应用而言无需形成过程,并且对高达50 μA的电流具有自一致性。当用于阈值切换时,低阈值电流有利于提高器件的选择性。通过能量色散X射线光谱和扫描透射电子显微镜测量的氧分布变化表明,器件在不同电阻状态下导电细丝的形成或断裂。因此,有人认为在电压扫描期间非晶态TiOx和多晶态TiOx薄膜中氧离子的推拉作用解释了器件中的存储器切换和阈值切换特性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fad3/4823777/26c7ae8cf920/srep23945-f1.jpg

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