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基于稠密等离子体聚焦的III-V族半导体纳米加工：独特特性与最新进展

Dense Plasma Focus-Based Nanofabrication of III-V Semiconductors: Unique Features and Recent Advances.

作者信息

Mangla Onkar, Roy Savita, Ostrikov Kostya Ken

机构信息

Department of Physics and Astrophysics, University of Delhi, Delhi 110007, India.

Physics Department, Hindu College, University of Delhi, Delhi 110007, India.

出版信息

Nanomaterials (Basel). 2015 Dec 29;6(1):4. doi: 10.3390/nano6010004.

DOI:10.3390/nano6010004
PMID:28344261
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5302538/
Abstract

The hot and dense plasma formed in modified dense plasma focus (DPF) device has been used worldwide for the nanofabrication of several materials. In this paper, we summarize the fabrication of III-V semiconductor nanostructures using the high fluence material ions produced by hot, dense and extremely non-equilibrium plasma generated in a modified DPF device. In addition, we present the recent results on the fabrication of porous nano-gallium arsenide (GaAs). The details of morphological, structural and optical properties of the fabricated nano-GaAs are provided. The effect of rapid thermal annealing on the above properties of porous nano-GaAs is studied. The study reveals that it is possible to tailor the size of pores with annealing temperature. The optical properties of these porous nano-GaAs also confirm the possibility to tailor the pore sizes upon annealing. Possible applications of the fabricated and subsequently annealed porous nano-GaAs in transmission-type photo-cathodes and visible optoelectronic devices are discussed. These results suggest that the modified DPF is an effective tool for nanofabrication of continuous and porous III-V semiconductor nanomaterials. Further opportunities for using the modified DPF device for the fabrication of novel nanostructures are discussed as well.

摘要

在改良型稠密等离子体聚焦（DPF）装置中形成的热且稠密的等离子体已在全球范围内用于多种材料的纳米制造。在本文中，我们总结了利用改良型DPF装置中产生的热、稠密且极度非平衡等离子体所产生的高通量材料离子来制造III-V族半导体纳米结构的方法。此外，我们展示了多孔纳米砷化镓（GaAs）制造方面的最新成果。提供了所制备的纳米GaAs的形态、结构和光学性质的详细信息。研究了快速热退火对多孔纳米GaAs上述性质的影响。研究表明，可以通过退火温度来调整孔隙尺寸。这些多孔纳米GaAs的光学性质也证实了退火后调整孔隙尺寸的可能性。讨论了所制备并随后退火的多孔纳米GaAs在透射型光电阴极和可见光电器件中的可能应用。这些结果表明，改良型DPF是用于连续和多孔III-V族半导体纳米材料纳米制造的有效工具。还讨论了使用改良型DPF装置制造新型纳米结构的更多机会。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/f17eba221a8d/nanomaterials-06-00004-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/79bdd7e1871c/nanomaterials-06-00004-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/4afd31f4143f/nanomaterials-06-00004-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/b800c75d47fd/nanomaterials-06-00004-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/a40b69da0851/nanomaterials-06-00004-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/56205ce49eb3/nanomaterials-06-00004-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/fe117e3988a8/nanomaterials-06-00004-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/44114a0dfd84/nanomaterials-06-00004-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/d0fdf2b31580/nanomaterials-06-00004-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/adfd493fd7b1/nanomaterials-06-00004-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/f17eba221a8d/nanomaterials-06-00004-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/79bdd7e1871c/nanomaterials-06-00004-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/4afd31f4143f/nanomaterials-06-00004-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/b800c75d47fd/nanomaterials-06-00004-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/a40b69da0851/nanomaterials-06-00004-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/56205ce49eb3/nanomaterials-06-00004-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/fe117e3988a8/nanomaterials-06-00004-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/44114a0dfd84/nanomaterials-06-00004-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/d0fdf2b31580/nanomaterials-06-00004-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/adfd493fd7b1/nanomaterials-06-00004-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/701f/5302538/f17eba221a8d/nanomaterials-06-00004-g010.jpg

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