Korea Electronics Technology Institute, Gyeonggi 13488, Korea.
Department of Emerging Materials Science, DGIST, Daegu 42988, Korea.
Sensors (Basel). 2018 Jul 12;18(7):2231. doi: 10.3390/s18072231.
In this paper, we propose a high accuracy open-type current sensor with a differential Planar Hall Resistive (PHR) sensor. Conventional open-type current sensors with magnetic sensors are usually vulnerable to interference from an external magnetic field. To reduce the effect of an unintended magnetic field, the proposed design uses a differential structure with PHR. The differential structure provides robust performance to unwanted magnetic flux and increased magnetic sensitivity. In addition, instead of conventional Hall sensors with a magnetic concentrator, a newly developed PHR with high sensitivity is employed to sense horizontal magnetic fields. The PHR sensor and read-out integrated circuit (IC) are integrated through a post-Complementary metal-oxide-semiconductor (CMOS) process using multi-chip packaging. The current sensor is designed to measure a 1 A current level. The measured performance of the designed current sensor has a 16 kHz bandwidth and a current nonlinearity of under ±0.5%.
本文提出了一种高精度开环电流传感器，采用差分平面霍尔电阻（PHR）传感器。传统的带有磁传感器的开环电流传感器通常容易受到外部磁场的干扰。为了减少非预期磁场的影响，所提出的设计采用带有 PHR 的差分结构。差分结构为不想要的磁通提供了强大的性能和更高的磁灵敏度。此外，与带有磁集中器的传统霍尔传感器不同，采用了新开发的具有高灵敏度的 PHR 来感应水平磁场。PHR 传感器和读出集成电路（IC）通过使用多芯片封装的后互补金属氧化物半导体（CMOS）工艺进行集成。该电流传感器设计用于测量 1 A 的电流水平。所设计的电流传感器的测量性能具有 16 kHz 的带宽和低于±0.5%的电流非线性。
