Institut Européen des Membranes IEM, UMR-5635, Université de Montpellier, ENSCM, CNRS, Place Eugène Bataillon, F-34095 Montpellier Cedex 5, France.
Institut Européen des Membranes IEM, UMR-5635, Université de Montpellier, ENSCM, CNRS, Place Eugène Bataillon, F-34095 Montpellier Cedex 5, France; Institut Universitaire de France (IUF), MESRI, 1 rue Descartes, 75231 Paris cedex 05, France.
Biosens Bioelectron. 2018 Dec 30;122:147-159. doi: 10.1016/j.bios.2018.09.038. Epub 2018 Sep 13.
Atomic layer deposition (ALD) is a thin film deposition technique currently used in various nanofabrication processes for microelectronic applications. The ability to coat high aspect ratio structures with a wide range of materials, the excellent conformality, and the exquisite thickness control have made ALD an essential tool for the fabrication of many devices, including biosensors. This mini-review aims to provide a summary of the different ways ALD has been used to prepare biosensor devices. The materials that have been deposited by ALD, the use of the ALD layers prepared and the different types of biosensors fabricated are presented. A selected list of studies will be used to illustrate how the ALD route can be implemented to improve the operational performance of biosensors. This work comprehensively shows the benefits of ALD and its application in various facets of biosensing and will help in exploiting the numerous prospects of this emerging and growing field.
原子层沉积（ALD）是一种薄膜沉积技术，目前用于各种微电子应用的纳米制造工艺中。该技术能够用各种材料涂覆高纵横比结构，具有出色的保形性和精密的厚度控制，这使得 ALD 成为许多器件制造的重要工具，包括生物传感器。本综述旨在总结 ALD 在制备生物传感器器件方面的不同应用方式。介绍了通过 ALD 沉积的材料、所制备的 ALD 层的用途以及制造的不同类型的生物传感器。将选择一些研究来举例说明如何实施 ALD 路线来改善生物传感器的工作性能。这项工作全面展示了 ALD 的优势及其在生物传感的各个方面的应用，并将有助于开发这个新兴且不断发展的领域的众多前景。
