Li Hongyuan, Ying Zhe, Lyu Bosai, Deng Aolin, Wang Lele, Taniguchi Takashi, Watanabe Kenji, Shi Zhiwen
Key Laboratory of Artificial Structures and Quantum Control (Ministry of Education), School of Physics and Astronomy , Shanghai Jiao Tong University , Shanghai 200240 , China.
Collaborative Innovation Center of Advanced Microstructures , Nanjing 210093 , China.
Nano Lett. 2018 Dec 12;18(12):8011-8015. doi: 10.1021/acs.nanolett.8b04166. Epub 2018 Dec 3.
Scanning probe lithography based on local anodic oxidation (LAO) provides a robust and general nanolithography tool for a wide range of applications. Its practical use, however, has been strongly hampered due to the requirement of a prefabricated microelectrode to conduct the driving electrical current. Here we report a novel electrode-free LAO technique, which enables in situ patterning of as-prepared low-dimensional materials and heterostructures with great flexibility and high precision. Unlike conventional LAO driven by a direct current, the electrode-free LAO is driven by a high-frequency (>10 kHz) alternating current applied through capacitive coupling, which eliminates the need of a contacting electrode and can be used even for tailoring insulating materials. Using this technique, we demonstrated flexible nanolithography of graphene, hexagonal boron nitride, and carbon nanotubes on insulating substrates with ∼10-nanometer precision. In addition, the electrode-free LAO exhibits high etching quality without oxide residues left. Such an in situ and electrode-free nanolithography with high etching quality opens up new opportunities for fabricating ultraclean nanoscale devices and heterostructures with great flexibility.
基于局部阳极氧化（LAO）的扫描探针光刻技术为广泛的应用提供了一种强大且通用的纳米光刻工具。然而，由于需要预制微电极来传导驱动电流，其实际应用受到了很大阻碍。在此，我们报告了一种新型的无电极LAO技术，该技术能够以极大的灵活性和高精度对制备好的低维材料和异质结构进行原位图案化。与由直流电驱动的传统LAO不同，无电极LAO由通过电容耦合施加的高频（>10 kHz）交流电驱动，这消除了对接触电极的需求，甚至可用于加工绝缘材料。利用该技术，我们在绝缘衬底上以约10纳米的精度展示了石墨烯、六方氮化硼和碳纳米管的柔性纳米光刻。此外，无电极LAO具有高蚀刻质量，不会留下氧化物残余物。这种具有高蚀刻质量的原位无电极纳米光刻为制造具有极大灵活性的超清洁纳米级器件和异质结构开辟了新机遇。
