Faculty of Technical Sciences, University of Novi Sad, Trg Dositeja Obradovica 6, 21000 Novi Sad, Serbia.
Institute Biosense, University of Novi Sad, Dr Zorana Djindjica 1, 21000 Novi Sad, Serbia.
Sensors (Basel). 2019 Apr 10;19(7):1719. doi: 10.3390/s19071719.
Microfluidics, one of the most attractive and fastest developed areas of modern science and technology, has found a number of applications in medicine, biology and chemistry. To address advanced designing challenges of the microfluidic devices, the research is mainly focused on development of efficient, low-cost and rapid fabrication technology with the wide range of applications. For the first time, this paper presents fabrication of microfluidic chips using hybrid fabrication technology-a grouping of the PVC (polyvinyl chloride) foils and the LTCC (Low Temperature Co-fired Ceramics) Ceram Tape using a combination of a cost-effective xurography technique and a laser micromachining process. Optical and dielectric properties were determined for the fabricated microfluidic chips. A mechanical characterization of the Ceram Tape, as a middle layer in its non-baked condition, has been performed and Young's modulus and hardness were determined. The obtained results confirm a good potential of the proposed technology for rapid fabrication of low-cost microfluidic chips with high reliability and reproducibility. The conducted microfluidic tests demonstrated that presented microfluidic chips can resist 3000 times higher flow rates than the chips manufactured using standard xurography technique.
微流控技术是现代科学技术中最具吸引力和发展最快的领域之一，在医学、生物学和化学领域已经找到了许多应用。为了解决微流控器件的高级设计挑战，研究主要集中在开发高效、低成本和快速制造技术，以满足广泛的应用需求。本文首次提出了使用混合制造技术制造微流控芯片的方法——将聚氯乙烯（PVC）箔片和低温共烧陶瓷（LTCC）陶瓷带组合在一起，结合经济高效的光刻技术和激光微加工工艺。对制造的微流控芯片进行了光学和介电性能的测定。对陶瓷带作为中间层在未烘烤状态下的机械特性进行了研究，确定了杨氏模量和硬度。获得的结果证实了所提出的技术在快速制造低成本微流控芯片方面具有良好的潜力，其可靠性和可重复性高。进行的微流控测试表明，与使用标准光刻技术制造的芯片相比，所提出的微流控芯片能够抵抗高达 3000 倍的流速。
