Becker Christian, Karnaushenko Daniil, Kang Tong, Karnaushenko Dmitriy D, Faghih Maryam, Mirhajivarzaneh Alaleh, Schmidt Oliver G
Institute for Integrative Nanosciences, Institute for Solid State and Materials Research Dresden (Leibniz IFW Dresden), 01069 Dresden, Germany.
Material Systems for Nanoelectronics, Chemnitz University of Technology, 09107 Chemnitz, Germany.
Sci Adv. 2019 Dec 20;5(12):eaay7459. doi: 10.1126/sciadv.aay7459. eCollection 2019 Dec.
Novel robotic, bioelectronic, and diagnostic systems require a variety of compact and high-performance sensors. Among them, compact three-dimensional (3D) vector angular encoders are required to determine spatial position and orientation in a 3D environment. However, fabrication of 3D vector sensors is a challenging task associated with time-consuming and expensive, sequential processing needed for the orientation of individual sensor elements in 3D space. In this work, we demonstrate the potential of 3D self-assembly to simultaneously reorient numerous giant magnetoresistive (GMR) spin valve sensors for smart fabrication of 3D magnetic angular encoders. During the self-assembly process, the GMR sensors are brought into their desired orthogonal positions within the three Cartesian planes in a simultaneous process that yields monolithic high-performance devices. We fabricated vector angular encoders with equivalent angular accuracy in all directions of 0.14°, as well as low noise and low power consumption during high-speed operation at frequencies up to 1 kHz.
新型机器人、生物电子和诊断系统需要各种紧凑且高性能的传感器。其中，紧凑型三维（3D）矢量角编码器用于确定三维环境中的空间位置和方向。然而，3D矢量传感器的制造是一项具有挑战性的任务，涉及在三维空间中对单个传感器元件进行定向所需的耗时且昂贵的顺序处理。在这项工作中，我们展示了3D自组装在同时重新定向众多巨磁阻（GMR）自旋阀传感器以实现3D磁角编码器智能制造方面的潜力。在自组装过程中，GMR传感器在三个笛卡尔平面内同时被置于所需的正交位置，从而产生单片式高性能器件。我们制造的矢量角编码器在所有方向上具有等效角精度0.14°，并且在高达1 kHz频率的高速运行期间具有低噪声和低功耗。
