Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review.

Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive functional devices. However, traditional planar processing techniques based on photolithography are inadequate in the construction of 3D microstructures. To solve this issue, researchers have proposed many strategies, among which 3D laser printing is becoming a prospective technique to create smart devices at the microscale because of its versatility, adjustability, and flexibility. Here, we review the recent progress in stimulus-responsive 3D microactuators fabricated with 3D laser printing depending on different stimuli. Then, an outlook of the design, fabrication, control, and applications of 3D laser-printed microactuators is propounded with the goal of providing a reference for related research.