Jaiswal Arun, Rastogi Chandresh Kumar, Rani Sweta, Singh Gaurav Pratap, Saxena Sumit, Shukla Shobha
Nanostructures Engineering and Modeling Laboratory, Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology Bombay, Mumbai, 400076, India.
Centre for Advanced Studies, Lucknow, 226031, India.
iScience. 2023 Mar 11;26(4):106374. doi: 10.1016/j.isci.2023.106374. eCollection 2023 Apr 21.
Two-photon lithography (TPL) is a versatile technology for additive manufacturing of 2D and 3D micro/nanostructures with sub-wavelength resolved features. Recent advancement in laser technology has enabled the application of TPL fabricated structures in several fields such as microelectronics, photonics, optoelectronics, microfluidics, and plasmonic devices. However, the lack of two-photon polymerizable resins (TPPRs) induces bottleneck to the growth of TPL to its true potential, and hence continuous research efforts are focused on developing efficient TPPRs. In this article, we review the recent advancements in PI and TPPR formulation and the impact of process parameters on fabrication of 2D and 3D structures for specific applications. The fundamentals of TPL are described, followed by techniques used for achieving improved resolution and functional micro/nanostructures. Finally, a critical outlook and future prospects of TPPR formulation for specific applications are presented.
双光子光刻(TPL)是一种用于增材制造具有亚波长分辨特征的二维和三维微纳结构的通用技术。激光技术的最新进展使得TPL制造的结构能够应用于微电子、光子学、光电子学、微流体和等离子体器件等多个领域。然而,双光子可聚合树脂(TPPR)的缺乏阻碍了TPL发挥其真正潜力的发展,因此持续的研究工作都集中在开发高效的TPPR上。在本文中,我们综述了聚酰亚胺(PI)和TPPR配方的最新进展以及工艺参数对特定应用中二维和三维结构制造的影响。文中描述了TPL的基本原理,接着介绍了用于实现更高分辨率和功能性微纳结构的技术。最后,给出了针对特定应用的TPPR配方的批判性展望和未来前景。