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通过毛细管梯度实现可拉伸半导体聚合物微结构的晶圆级集成。

Wafer-scale integration of stretchable semiconducting polymer microstructures via capillary gradient.

作者信息

Qiu Yuchen, Zhang Bo, Yang Junchuan, Gao Hanfei, Li Shuang, Wang Le, Wu Penghua, Su Yewang, Zhao Yan, Feng Jiangang, Jiang Lei, Wu Yuchen

机构信息

Key Laboratory of Bio-inspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, 100190, P. R. China.

College of Chemistry, Jilin University, Changchun, 130012, P. R. China.

出版信息

Nat Commun. 2021 Dec 2;12(1):7038. doi: 10.1038/s41467-021-27370-w.

Abstract

Organic semiconducting polymers have opened a new paradigm for soft electronics due to their intrinsic flexibility and solution processibility. However, the contradiction between the mechanical stretchability and electronic performances restricts the implementation of high-mobility polymers with rigid molecular backbone in deformable devices. Here, we report the realization of high mobility and stretchability on curvilinear polymer microstructures fabricated by capillary-gradient assembly method. Curvilinear polymer microstructure arrays are fabricated with highly ordered molecular packing, controllable pattern, and wafer-scale homogeneity, leading to hole mobilities of 4.3 and 2.6 cm V s under zero and 100% strain, respectively. Fully stretchable field-effect transistors and logic circuits can be integrated in solution process. Long-range homogeneity is demonstrated with the narrow distribution of height, width, mobility, on-off ratio and threshold voltage across a four-inch wafer. This solution-assembly method provides a platform for wafer-scale and reproducible integration of high-performance soft electronic devices and circuits based on organic semiconductors.

摘要

有机半导体聚合物因其固有的柔韧性和溶液可加工性,为柔性电子学开辟了新的范例。然而,机械拉伸性与电子性能之间的矛盾限制了具有刚性分子主链的高迁移率聚合物在可变形器件中的应用。在此,我们报告了通过毛细管梯度组装法制备的曲线形聚合物微结构实现了高迁移率和拉伸性。曲线形聚合物微结构阵列具有高度有序的分子排列、可控的图案和晶圆级均匀性,在零应变和100%应变下分别导致空穴迁移率为4.3和2.6 cm² V⁻¹ s⁻¹。完全可拉伸的场效应晶体管和逻辑电路可以在溶液工艺中集成。通过在四英寸晶圆上高度、宽度、迁移率、开关比和阈值电压的窄分布证明了长程均匀性。这种溶液组装方法为基于有机半导体的高性能柔性电子器件和电路的晶圆级和可重复集成提供了一个平台。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0800/8640044/48a3cbb3f15c/41467_2021_27370_Fig1_HTML.jpg

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