Shanghai Key Lab for Future Computing Hardware and System, School of Microelectronics, Fudan University, Shanghai, China.
State Key Laboratory of Silicon Materials, School of Micro-Nano Electronics & Materials Science and Engineering, Zhejiang University, Hangzhou, China.
Nat Mater. 2022 Nov;21(11):1225-1239. doi: 10.1038/s41563-022-01383-2. Epub 2022 Oct 25.
Despite technical efforts and upgrades, advances in complementary metal-oxide-semiconductor circuits have become unsustainable in the face of inherent silicon limits. New materials are being sought to compensate for silicon deficiencies, and two-dimensional materials are considered promising candidates due to their atomically thin structures and exotic physical properties. However, a potentially applicable method for incorporating two-dimensional materials into silicon platforms remains to be illustrated. Here we try to bridge two-dimensional materials and silicon technology, from integrated devices to monolithic 'on-silicon' (silicon as the substrate) and 'with-silicon' (silicon as a functional component) circuits, and discuss the corresponding requirements for material synthesis, device design and circuitry integration. Finally, we summarize the role played by two-dimensional materials in the silicon-dominated semiconductor industry and suggest the way forward, as well as the technologies that are expected to become mainstream in the near future.
尽管在技术上做出了努力并进行了升级，但面对硅材料固有的限制，互补金属氧化物半导体电路的发展已经难以为继。人们正在寻找新的材料来弥补硅的不足，而二维材料由于其原子级薄的结构和奇特的物理特性，被认为是很有前途的候选材料。然而，将二维材料纳入硅平台的一种潜在适用方法仍有待说明。在这里，我们尝试将二维材料和硅技术联系起来，从集成器件到单片“硅基(on-silicon)”（硅作为衬底）和“硅内(with-silicon)”（硅作为功能组件）电路，并讨论了相应的材料合成、器件设计和电路集成要求。最后，我们总结了二维材料在硅主导的半导体行业中所扮演的角色，并提出了未来的发展方向，以及预计在不久的将来成为主流的技术。
