Shin Wonjun, Byeon Junsung, Koo Ryun-Han, Lim Jungmoon, Kang Jung Hyeon, Jang A-Rang, Lee Jong-Ho, Kim Jae-Joon, Cha SeungNam, Pak Sangyeon, Lee Sung-Tae
Inter-University Semiconductor Research Center, Department of Electrical and Computer Engineering, Seoul National University, Seoul, 08826, Republic of Korea.
Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Gyeonggi-do, Suwon, 16419, Republic of Korea.
Adv Sci (Weinh). 2024 Jul;11(28):e2307196. doi: 10.1002/advs.202307196. Epub 2024 May 21.
The pursuit of sub-1-nm field-effect transistor (FET) channels within 3D semiconducting crystals faces challenges due to diminished gate electrostatics and increased charge carrier scattering. 2D semiconductors, exemplified by transition metal dichalcogenides, provide a promising alternative. However, the non-idealities, such as excess low-frequency noise (LFN) in 2D FETs, present substantial hurdles to their realization and commercialization. In this study, ideal LFN characteristics in monolayer MoS FETs are attained by engineering the metal-2D semiconductor contact and the subgap density of states (DOS). By probing non-ideal contact resistance effects using CuS and Au electrodes, it is uncovered that excess contact noise in the high drain current (I) region can be substantially reduced by forming a van der Waals junction with CuS electrodes. Furthermore, thermal annealing effectively mitigates sulfur vacancy-induced subgap density of states (DOS), diminishing excess noise in the low I region. Through meticulous optimization of metal-2D semiconductor contacts and subgap DOS, alignment of 1/f noise with the pure carrier number fluctuation model is achieved, ultimately achieving the sought-after ideal LFN behavior in monolayer MoS FETs. This study underscores the necessity of refining excess noise, heralding improved performance and reliability of 2D electronic devices.
在三维半导体晶体中追求亚1纳米场效应晶体管(FET)沟道面临挑战,这是由于栅极静电减弱和电荷载流子散射增加所致。以过渡金属二硫属化物为代表的二维半导体提供了一种有前景的替代方案。然而,二维FET中的非理想特性,如过量的低频噪声(LFN),给它们的实现和商业化带来了重大障碍。在本研究中,通过设计金属-二维半导体接触和亚带隙态密度(DOS),实现了单层MoS FET的理想LFN特性。通过使用CuS和Au电极探测非理想接触电阻效应,发现通过与CuS电极形成范德华结,可以大幅降低高漏极电流(I)区域中的过量接触噪声。此外,热退火有效地减轻了硫空位诱导的亚带隙态密度(DOS),减少了低I区域中的过量噪声。通过对金属-二维半导体接触和亚带隙DOS进行精心优化,实现了1/f噪声与纯载流子数涨落模型的匹配,最终在单层MoS FET中实现了所追求的理想LFN行为。本研究强调了改善过量噪声的必要性,预示着二维电子器件性能和可靠性的提升。