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亚玻尔兹曼开关、无滞后电荷调制负微分电阻鳍式场效应晶体管

Sub-Boltzmann Switching, Hysteresis-Free Charge Modulated Negative Differential Resistance FinFET.

作者信息

Sung Juho, Kang Sanghyun, Han Donghwan, Kim Gwon, Lim Jaehyuk, Son Myoungsu, Shin Changhwan

机构信息

Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Korea.

Semiconductor R&D Center, Samsung Electronics, Hwasung 18448, Korea.

出版信息

ACS Nano. 2024 Oct 1;18(39):26975-26985. doi: 10.1021/acsnano.4c08977. Epub 2024 Sep 16.

DOI:10.1021/acsnano.4c08977
PMID:39284742
Abstract

The ever-increasing power consumption in integrated circuits has raised concerns about the relentless doubling of transistor density in chips and cost drop per combinational/sequential circuits. To address the physical limit of thermionic emission carrier transport (i.e., subthreshold swing >60 mV/decade at 300 K), alternative charge-transport mechanisms or the implementation of functional substances have been attempted but without appreciable success. One such choice is to take advantage of negative differential resistance with the activation of localized electrons or migration of atom and oxygen vacancies to extend the capabilities of Si-transistors. However, inconsistency in current during forward/reverse bias sweep is confronted as a notable weak point. This work proposes an eye-catching solution to modulating potential distribution between a resistance switching layer and a transistor by employing charge trapping within a hafnium zirconium oxide layer. This approach introduces features advancing the potential of "More Moore" technologies.

摘要

集成电路中不断增加的功耗引发了人们对芯片中晶体管密度持续翻倍以及每个组合/时序电路成本下降的担忧。为了解决热电子发射载流子传输的物理极限(即300K时亚阈值摆幅>60mV/十倍频程),人们尝试了替代电荷传输机制或功能性物质的应用,但未取得显著成功。其中一种选择是利用负微分电阻,通过激活局域电子或原子及氧空位的迁移来扩展硅晶体管的性能。然而,正向/反向偏置扫描期间电流的不一致是一个明显的弱点。这项工作提出了一个引人注目的解决方案,即通过在氧化铪锆层中进行电荷俘获来调制电阻开关层和晶体管之间的电位分布。这种方法引入了推进“More Moore”技术潜力的特性。

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