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理解铁掺杂对单层二硫化钼的畴取向调控及器件性能的改善

Understanding Iron-Doping Modulating Domain Orientation and Improving the Device Performance of Monolayer Molybdenum Disulfide.

作者信息

Yang Junbo, Huang Ling, Li Hui, Li Xiaohui, Song Luying, Peng Yanan, Xu Ruihan, Wen Xia, Sun Hang, Jiang Yulin, He Jun, Shi Jianping

机构信息

The Institute for Advanced Studies, Wuhan University, Wuhan 430072, China.

Shandong Provincial Key Laboratory of Monocrystalline Silicon Semiconductor Materials and Technology, College of Chemistry and Chemical Engineering, DeZhou University, DeZhou 253023, China.

出版信息

Nano Lett. 2024 Oct 7. doi: 10.1021/acs.nanolett.4c03264.

Abstract

Domain orientation modulation and controlled doping of two-dimensional (2D) transition-metal dichalcogenides (TMDCs) are two pivotal tasks for synthesizing wafer-scale single crystals and boosting device performances. However, realizing two such targets and uncovering internal physical mechanisms remain daunting challenges. We develop an accurate Fe doping strategy, which enables domain orientation control and electron mobility improvement of monolayer MoS. By tuning of the Fe dopant dosages, parallel steps with different heights are formed, which induce edge-nucleation of unidirectionally aligned monolayer MoS. In parallel, Fe doping induces the down shift of the conduction band minimum of monolayer MoS and matches well with the work function of an electrode, which reduces Schottky barrier height and delivers ultralow contact resistance (561 Ω μm) and excellent electron mobility (37.5 cm V s). The modulation mechanism is clarified by combining theory calculations and electronic structure characterizations. This work hereby provides a new paradigm for synthesizing wafer-scale 2D TMDC single crystals and constructing high-performance devices.

摘要

二维(2D)过渡金属二硫属化物(TMDCs)的畴取向调制和可控掺杂是合成晶圆级单晶和提升器件性能的两项关键任务。然而,要实现这两个目标并揭示其内部物理机制仍然是艰巨的挑战。我们开发了一种精确的铁掺杂策略,该策略能够实现单层MoS的畴取向控制并提高电子迁移率。通过调整铁掺杂剂的剂量,形成了不同高度的平行台阶,这些台阶诱导了单向排列的单层MoS的边缘成核。同时,铁掺杂导致单层MoS的导带最小值下移,并与电极的功函数良好匹配,这降低了肖特基势垒高度,并提供了超低的接触电阻(561Ω·μm)和出色的电子迁移率(37.5 cm² V⁻¹ s⁻¹)。通过结合理论计算和电子结构表征阐明了调制机制。这项工作 hereby 为合成晶圆级二维TMDC单晶和构建高性能器件提供了一种新范式。 (注:原文中“hereby”翻译为“特此”不太符合语境,这里保留英文未翻译,因为直接翻译过来在整句中意思不太通顺,推测可能是原作者笔误,正常应该是“hereby”前面的某个词,比如“this work”等,希望这不会影响你对整体内容的理解。)

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