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通过离子辐照获得的平面图案化磁性介质。

Planar patterned magnetic media obtained by ion irradiation.

作者信息

Chappert C, Bernas H, Ferre J, Kottler V, Jamet J, Chen Y, Cambril E, Devolder T, Rousseaux F, Mathet V, Launois H

机构信息

C. Chappert, V. Kottler, T. Devolder, V. Mathet, Institut d'Electronique Fondamentale, Unite de Recherche Associee CNRS 022, Universite Paris Sud, 91405 Orsay Cedex, France. H. Bernas, Centre de Spectrometrie Nucleaire et de Spectromet.

出版信息

Science. 1998 Jun 19;280(5371):1919-22. doi: 10.1126/science.280.5371.1919.

Abstract

By ion irradiation through a lithographically made resist mask, the magnetic properties of cobalt-platinum simple sandwiches and multilayers were patterned without affecting their roughness and optical properties. This was demonstrated on arrays of 1-micrometer lines by near- and far-field magnetooptical microscopy. The coercive force and magnetic anisotropy of the irradiated regions can be accurately controlled by the irradiation fluence. If combined with high-resolution lithography, this technique holds promise for ultrahigh-density magnetic recording applications.

摘要

通过光刻制作的抗蚀剂掩膜进行离子辐照,钴铂简单三明治结构和多层结构的磁性被图案化,而不影响其粗糙度和光学性质。通过近场和远场磁光显微镜在1微米线阵列上证明了这一点。辐照区域的矫顽力和磁各向异性可通过辐照通量精确控制。如果与高分辨率光刻相结合,该技术在超高密度磁记录应用方面具有前景。

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