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具有自限域节距的超高密度半导体纳米管阵列的边缘场介电泳组装。

Fringing-field dielectrophoretic assembly of ultrahigh-density semiconducting nanotube arrays with a self-limited pitch.

机构信息

Department of Physical Sciences, IBM T.J. Watson Research Centre, Yorktown Heights, New York 10598, USA.

出版信息

Nat Commun. 2014 Sep 26;5:5071. doi: 10.1038/ncomms6071.

Abstract

One key challenge of realizing practical high-performance electronic devices based on single-walled carbon nanotubes is to produce electronically pure nanotube arrays with both a minuscule and uniform inter-tube pitch for sufficient device-packing density and homogeneity. Here we develop a method in which the alternating voltage-fringing electric field formed between surface microelectrodes and the substrate is utilized to assemble semiconducting nanotubes into well-aligned, ultrahigh-density and submonolayered arrays, with a consistent pitch as small as 21±6 nm determined by a self-limiting mechanism, based on the unique field focusing and screening effects of the fringing field. Field-effect transistors based on such nanotube arrays exhibit record high device transconductance (>50 μS μm(-1)) and decent on current per nanotube (~1 μA per tube) together with high on/off ratios at a drain bias of -1 V.

摘要

实现基于单壁碳纳米管的实用高性能电子器件的一个关键挑战是生产具有微小且均匀的管间间距的电子纯纳米管阵列,以实现足够的器件封装密度和均一性。在这里,我们开发了一种方法,利用表面微电极和基底之间形成的交变电压 fring 电场将半导体纳米管组装成高度有序、超高密度和亚单层的阵列,其间距一致,小至 21±6nm,这是基于 fring 电场的独特场聚焦和屏蔽效应的自限制机制。基于这种纳米管阵列的场效应晶体管表现出创纪录的高器件跨导(>50μSμm(-1))和每根纳米管的良好电流(~1μA per tube),以及在-1V 漏极偏压下的高导通/关断比。

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