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通过超快激光光刻3D打印的光学透明且有弹性的自由形式微光学器件

Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography.

作者信息

Jonušauskas Linas, Gailevičius Darius, Mikoliūnaitė Lina, Sakalauskas Danas, Šakirzanovas Simas, Juodkazis Saulius, Malinauskas Mangirdas

机构信息

Department of Quantum Electronics, Faculty of Physics, Vilnius University, Saulėtekio Ave. 10, Vilnius LT-10223, Lithuania.

Department of Applied Chemistry, Vilnius University, Naugarduko Str. 24, Vilnius LT-03225, Lithuania.

出版信息

Materials (Basel). 2017 Jan 2;10(1):12. doi: 10.3390/ma10010012.

DOI:10.3390/ma10010012
PMID:28772389
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5344581/
Abstract

We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the fabrication peculiarities and quality of resultant structures is performed. Comparison of microlens resiliency to continuous wave (CW) and femtosecond pulsed exposure is determined. Experimental results prove that pure SZ2080 is ∼20 fold more resistant to high irradiance as compared with standard lithographic material (SU8) and can sustain up to 1.91 GW/cm² intensity. 3DLL is a promising manufacturing approach for high-intensity micro-optics for emerging fields in astro-photonics and atto-second pulse generation. Additionally, pyrolysis is employed to homogeneously shrink structures up to 40% by removing organic SZ2080 constituents. This opens a promising route towards downscaling photonic lattices and the creation of mechanically robust glass-ceramic microstructures.

摘要

我们介绍了通过飞秒三维激光光刻（3DLL）制造的由纯（非光敏）有机-无机SZ2080材料制成的光学透明且有弹性的自由形式微光学元件。这对于3D微/纳米光学器件的快速打印是有利的，包括将它们直接集成到光纤上。对所得结构的制造特性和质量进行了系统研究。确定了微透镜对连续波（CW）和飞秒脉冲曝光的弹性比较。实验结果证明，与标准光刻材料（SU8）相比，纯SZ2080对高辐照度的耐受性高约20倍，并且能够承受高达1.91 GW/cm²的强度。3DLL是一种用于天文光子学和阿秒脉冲产生等新兴领域的高强度微光学器件的有前途的制造方法。此外，采用热解通过去除有机SZ2080成分将结构均匀收缩高达40%。这为缩小光子晶格尺寸和创建机械坚固的玻璃陶瓷微结构开辟了一条有前途的途径。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a181/5344581/46b06c8d3a31/materials-10-00012-g013.jpg
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