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二维晶体管向集成电路发展的趋势:缩小尺寸与新机制

The Trend of 2D Transistors toward Integrated Circuits: Scaling Down and New Mechanisms.

作者信息

Shen Yang, Dong Zuoyuan, Sun Yabin, Guo Hao, Wu Fan, Li Xianglong, Tang Jun, Liu Jun, Wu Xing, Tian He, Ren Tian-Ling

机构信息

Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist) School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100084, China.

Shanghai Key Laboratory of Multidimensional Information Processing, School of Communication and Electronic Engineering, East China Normal University, Shanghai, 200241, China.

出版信息

Adv Mater. 2022 Dec;34(48):e2201916. doi: 10.1002/adma.202201916. Epub 2022 Oct 17.

Abstract

2D transition metal chalcogenide (TMDC) materials, such as MoS , have recently attracted considerable research interest in the context of their use in ultrascaled devices owing to their excellent electronic properties. Microprocessors and neural network circuits based on MoS have been developed at a large scale but still do not have an advantage over silicon in terms of their integrated density. In this study, the current structures, contact engineering, and doping methods for 2D TMDC materials for the scaling-down process and performance optimization are reviewed. Devices are introduced according to a new mechanism to provide the comprehensive prospects for the use of MoS beyond the traditional complementary-metal-oxide semiconductor in order to summarize obstacles to the goal of developing high-density and low-power integrated circuits (ICs). Finally, prospects for the use of MoS in large-scale ICs from the perspectives of the material, system performance, and application to nonlogic functionalities such as sensor circuits and analogous circuits, are briefly analyzed. The latter issue is along the direction of "more than Moore" research.

摘要

二维过渡金属硫族化合物(TMDC)材料,如二硫化钼(MoS₂),由于其优异的电子特性,近期在超大规模器件应用方面引发了大量研究兴趣。基于二硫化钼的微处理器和神经网络电路已得到大规模开发,但在集成密度方面仍不具备超越硅的优势。本研究对二维TMDC材料在缩小工艺和性能优化方面的当前结构、接触工程及掺杂方法进行了综述。根据一种新机制介绍了相关器件,以提供二硫化钼在传统互补金属氧化物半导体之外应用的全面前景,从而总结开发高密度、低功耗集成电路(IC)目标所面临的障碍。最后,从材料、系统性能以及在诸如传感器电路和模拟电路等非逻辑功能应用的角度,简要分析了二硫化钼在大规模IC中的应用前景。后一个问题是沿着“超越摩尔定律”研究的方向。

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