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用于新一代显示器的 RGB 微 LED 的并发自组装。

Concurrent self-assembly of RGB microLEDs for next-generation displays.

机构信息

Materials & Devices Advanced Research Center, LG Electronics, Seoul, Republic of Korea.

出版信息

Nature. 2023 May;617(7960):287-291. doi: 10.1038/s41586-023-05889-w. Epub 2023 May 3.

DOI:10.1038/s41586-023-05889-w
PMID:37138079
Abstract

MicroLED displays have been in the spotlight as the next-generation displays owing to their various advantages, including long lifetime and high brightness compared with organic light-emitting diode (OLED) displays. As a result, microLED technology is being commercialized for large-screen displays such as digital signage and active R&D programmes are being carried out for other applications, such as augmented reality, flexible displays and biological imaging. However, substantial obstacles in transfer technology, namely, high throughput, high yield and production scalability up to Generation 10+ (2,940 × 3,370 mm) glass sizes, need to be overcome so that microLEDs can enter mainstream product markets and compete with liquid-crystal displays and OLED displays. Here we present a new transfer method based on fluidic self-assembly (FSA) technology, named magnetic-force-assisted dielectrophoretic self-assembly technology (MDSAT), which combines magnetic and dielectrophoresis (DEP) forces to achieve a simultaneous red, green and blue (RGB) LED transfer yield of 99.99% within 15 min. By embedding nickel, a ferromagnetic material, in the microLEDs, their movements were controlled by using magnets, and by applying localized DEP force centred around the receptor holes, these microLEDs were effectively captured and assembled in the receptor site. Furthermore, concurrent assembly of RGB LEDs were demonstrated through shape matching between microLEDs and receptors. Finally, a light-emitting panel was fabricated, showing damage-free transfer characteristics and uniform RGB electroluminescence emission, demonstrating our MDSAT method to be an excellent transfer technology candidate for high-volume production of mainstream commercial products.

摘要

微发光二极管 (microLED) 显示器由于其与有机发光二极管 (OLED) 显示器相比具有长寿命和高亮度等各种优势,因此成为下一代显示器的焦点。因此,微 LED 技术正在用于大屏幕显示器,如数字标牌,并正在开展其他应用的积极研发计划,如增强现实、柔性显示器和生物成像。然而,在转移技术方面存在重大障碍,即需要实现高通量、高良率和生产可扩展性,直至第 10 代及以上(2940×3370mm)玻璃尺寸,以便 microLED 能够进入主流产品市场并与液晶显示器和 OLED 显示器竞争。在这里,我们提出了一种基于流体自组装 (FSA) 技术的新转移方法,称为磁力辅助介电泳自组装技术 (MDSAT),它结合了磁力和介电泳 (DEP) 力,在 15 分钟内实现了 99.99%的同时红、绿、蓝 (RGB) LED 转移良率。通过在 microLED 中嵌入铁磁材料镍,可以使用磁铁控制它们的运动,并通过施加集中在受体孔周围的局部 DEP 力,有效地捕获并将这些 microLED 组装到受体位置。此外,通过 microLED 和受体之间的形状匹配,演示了 RGB LED 的同时组装。最后,制造了一个发光面板,显示出无损的转移特性和均匀的 RGB 电致发光发射,证明了我们的 MDSAT 方法是一种用于主流商业产品大批量生产的优秀转移技术候选方案。

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