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微纳通道制造中新兴技术的全面综述：局限性、应用及比较

A Thorough Review of Emerging Technologies in Micro- and Nanochannel Fabrication: Limitations, Applications, and Comparison.

作者信息

Karimi Koosha, Fardoost Ali, Mhatre Nikhil, Rajan Jay, Boisvert David, Javanmard Mehdi

机构信息

Department of Electrical and Computer Engineering, Rutgers University, Piscataway, NJ 08854, USA.

出版信息

Micromachines (Basel). 2024 Oct 21;15(10):1274. doi: 10.3390/mi15101274.

DOI:10.3390/mi15101274
PMID:39459148
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11509582/
Abstract

In recent years, the field of micro- and nanochannel fabrication has seen significant advancements driven by the need for precision in biomedical, environmental, and industrial applications. This review provides a comprehensive analysis of emerging fabrication technologies, including photolithography, soft lithography, 3D printing, electron-beam lithography (EBL), wet/dry etching, injection molding, focused ion beam (FIB) milling, laser micromachining, and micro-milling. Each of these methods offers unique advantages in terms of scalability, precision, and cost-effectiveness, enabling the creation of highly customized micro- and nanochannel structures. Challenges related to scalability, resolution, and the high cost of traditional techniques are addressed through innovations such as deep reactive ion etching (DRIE) and multipass micro-milling. This paper also explores the application potential of these technologies in areas such as lab-on-a-chip devices, biomedical diagnostics, and energy-efficient cooling systems. With continued research and technological refinement, these methods are poised to significantly impact the future of microfluidic and nanofluidic systems.

摘要

近年来，由于生物医学、环境和工业应用对精度的需求，微纳通道制造领域取得了重大进展。本综述对新兴制造技术进行了全面分析，包括光刻、软光刻、3D打印、电子束光刻（EBL）、湿/干蚀刻、注塑成型、聚焦离子束（FIB）铣削、激光微加工和微铣削。这些方法中的每一种在可扩展性、精度和成本效益方面都具有独特的优势，能够创建高度定制的微纳通道结构。通过诸如深反应离子蚀刻（DRIE）和多道微铣削等创新技术，解决了与可扩展性、分辨率以及传统技术高成本相关的挑战。本文还探讨了这些技术在诸如芯片实验室设备、生物医学诊断和节能冷却系统等领域的应用潜力。随着持续的研究和技术改进，这些方法有望对微流体和纳流体系统的未来产生重大影响。

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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/271b/11509582/43cb60e4f500/micromachines-15-01274-g007.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/271b/11509582/45359a926cf6/micromachines-15-01274-g009.jpg
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