Karimi Koosha, Fardoost Ali, Mhatre Nikhil, Rajan Jay, Boisvert David, Javanmard Mehdi
Department of Electrical and Computer Engineering, Rutgers University, Piscataway, NJ 08854, USA.
Micromachines (Basel). 2024 Oct 21;15(10):1274. doi: 10.3390/mi15101274.
In recent years, the field of micro- and nanochannel fabrication has seen significant advancements driven by the need for precision in biomedical, environmental, and industrial applications. This review provides a comprehensive analysis of emerging fabrication technologies, including photolithography, soft lithography, 3D printing, electron-beam lithography (EBL), wet/dry etching, injection molding, focused ion beam (FIB) milling, laser micromachining, and micro-milling. Each of these methods offers unique advantages in terms of scalability, precision, and cost-effectiveness, enabling the creation of highly customized micro- and nanochannel structures. Challenges related to scalability, resolution, and the high cost of traditional techniques are addressed through innovations such as deep reactive ion etching (DRIE) and multipass micro-milling. This paper also explores the application potential of these technologies in areas such as lab-on-a-chip devices, biomedical diagnostics, and energy-efficient cooling systems. With continued research and technological refinement, these methods are poised to significantly impact the future of microfluidic and nanofluidic systems.
近年来,由于生物医学、环境和工业应用对精度的需求,微纳通道制造领域取得了重大进展。本综述对新兴制造技术进行了全面分析,包括光刻、软光刻、3D打印、电子束光刻(EBL)、湿/干蚀刻、注塑成型、聚焦离子束(FIB)铣削、激光微加工和微铣削。这些方法中的每一种在可扩展性、精度和成本效益方面都具有独特的优势,能够创建高度定制的微纳通道结构。通过诸如深反应离子蚀刻(DRIE)和多道微铣削等创新技术,解决了与可扩展性、分辨率以及传统技术高成本相关的挑战。本文还探讨了这些技术在诸如芯片实验室设备、生物医学诊断和节能冷却系统等领域的应用潜力。随着持续的研究和技术改进,这些方法有望对微流体和纳流体系统的未来产生重大影响。
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