Institute of Inorganic Chemistry and JARA - Fundamentals of Future Information Technology, RWTH Aachen University, Landoltweg 1, D-52056 Aachen, Germany.
Beilstein J Nanotechnol. 2013 May 31;4:336-44. doi: 10.3762/bjnano.4.39. Print 2013.
The fabrication of periodic arrays of single metal nanoparticles is of great current interest. In this paper we present a straight-forward three-step procedure based on chemical electron beam lithography, which is capable of producing such arrays with gold nanoparticles (AuNPs). Preformed 6 nm AuNPs are immobilised on thiol patterns with a pitch of 100 nm by guided self-assembly. Afterwards, these arrays are characterised by using atomic force microscopy.
周期性单金属纳米粒子阵列的制造是目前的研究热点。本文提出了一种基于化学电子束光刻的三步直写法，该方法能够制备金纳米粒子（AuNPs）的这种阵列。通过导向自组装，将预形成的 6nm AuNPs 固定在间距为 100nm 的硫醇图案上。然后，使用原子力显微镜对这些阵列进行表征。
