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超小型铟镓磷介电与等离子体纳米激光器

Ultrasmall InGa(As)P Dielectric and Plasmonic Nanolasers.

作者信息

Sarkar Debarghya, Cho Sangyeon, Yan Hao, Martino Nicola, Dannenberg Paul H, Yun Seok Hyun

机构信息

Harvard Medical School, Boston, Massachusetts 02115, United States.

Wellman Center for Photomedicine, Massachusetts General Hospital, Boston, Massachusetts 02114, United States.

出版信息

ACS Nano. 2023 Aug 22;17(16):16048-16055. doi: 10.1021/acsnano.3c04721. Epub 2023 Jul 31.

Abstract

Nanolasers have great potential for both on-chip light sources and optical barcoding particles. We demonstrate ultrasmall InGaP and InGaAsP disk lasers with diameters down to 360 nm (198 nm in height) in the red spectral range. Optically pumped, room-temperature, single-mode lasing was achieved from both disk-on-pillar and isolated particles. When isolated disks were placed on gold, plasmon polariton lasing was obtained with Purcell-enhanced stimulated emission. UV lithography and plasma ashing enabled wafer-scale fabrication of nanodisks with an intended random size variation. Silica-coated nanodisk particles generated stable subnanometer spectra from within biological cells across an 80 nm bandwidth from 635 to 715 nm.

摘要

纳米激光器在片上光源和光学条形码粒子方面都具有巨大潜力。我们展示了在红色光谱范围内直径低至360 nm(高度为198 nm)的超小InGaP和InGaAsP圆盘激光器。通过光泵浦在室温下实现了柱上圆盘和孤立粒子的单模激光发射。当将孤立的圆盘放置在金上时,通过珀塞尔增强的受激发射获得了表面等离激元极化激元激光发射。紫外光刻和等离子体灰化实现了具有预期随机尺寸变化的纳米圆盘的晶圆级制造。二氧化硅包覆的纳米圆盘粒子在生物细胞内产生了从635至715 nm的80 nm带宽内稳定的亚纳米光谱。

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